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Etching of Uncompensated Convex Corners with Sides along <n10> and <100> in 25 wt% TMAH at 80 °C.
Micromachines (Basel). 2020 Feb 27;11(3):253. doi: 10.3390/mi11030253.
Micromachines (Basel). 2020.
PMID: 32121024
Free PMC article.
Monolithically Integrated Diffused Silicon Two-Zone Heaters for Silicon-Pyrex Glass Microreactors for Production of Nanoparticles: Heat Exchange Aspects.
Rašljić Rafajilović M, Radulović K, Smiljanić MM, Lazić Ž, Jakšić Z, Stanisavljev D, Vasiljević Radović D.
Rašljić Rafajilović M, et al. Among authors: lazic z.
Micromachines (Basel). 2020 Aug 28;11(9):818. doi: 10.3390/mi11090818.
Micromachines (Basel). 2020.
PMID: 32872382
Free PMC article.
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Evolution of Si Crystallographic Planes-Etching of Square and Circle Patterns in 25 wt % TMAH.
Smiljanić MM, Lazić Ž, Radjenović B, Radmilović-Radjenović M, Jović V.
Smiljanić MM, et al. Among authors: lazic z.
Micromachines (Basel). 2019 Jan 31;10(2):102. doi: 10.3390/mi10020102.
Micromachines (Basel). 2019.
PMID: 30708946
Free PMC article.
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