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A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices.
Algamili AS, Khir MHM, Dennis JO, Ahmed AY, Alabsi SS, Ba Hashwan SS, Junaid MM. Algamili AS, et al. Among authors: ahmed ay. Nanoscale Res Lett. 2021 Jan 26;16(1):16. doi: 10.1186/s11671-021-03481-7. Nanoscale Res Lett. 2021. PMID: 33496852 Free PMC article. Review.