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Page 1
Wafer-Level Self-Packaging Design and Fabrication of MEMS Capacitive Pressure Sensors.
Micromachines (Basel). 2022 May 6;13(5):738. doi: 10.3390/mi13050738.
Micromachines (Basel). 2022.
PMID: 35630205
Free PMC article.
Fabrications of L-band LiNbO3-based SAW Resonators for Aerospace Applications.
Hu B, Zhang S, Zhang H, Lv W, Zhang C, Lv X, San H.
Hu B, et al.
Micromachines (Basel). 2019 May 28;10(6):349. doi: 10.3390/mi10060349.
Micromachines (Basel). 2019.
PMID: 31141949
Free PMC article.
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