Systematic Characterization of Plasma-Etched Trenches on 4H-SiC Wafers.
ACS Omega. 2021 Jul 28;6(31):20667-20675. doi: 10.1021/acsomega.1c02905. eCollection 2021 Aug 10.
ACS Omega. 2021.
PMID: 34396012
Free PMC article.