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Metasurface Fabrication by Cryogenic and Bosch Deep Reactive Ion Etching.
Baracu AM, Dirdal CA, Avram AM, Dinescu A, Muller R, Jensen GU, Thrane PCV, Angelskår H. Baracu AM, et al. Among authors: angelskar h. Micromachines (Basel). 2021 Apr 29;12(5):501. doi: 10.3390/mi12050501. Micromachines (Basel). 2021. PMID: 33946701 Free PMC article.