Plasma-Enhanced Atomic Layer Deposition of TiN Thin Films as an Effective Se Diffusion Barrier for CIGS Solar Cells.
Nanomaterials (Basel). 2021 Feb 2;11(2):370. doi: 10.3390/nano11020370.
Nanomaterials (Basel). 2021.
PMID: 33540729
Free PMC article.