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Simple and Efficient AlN-Based Piezoelectric Energy Harvesters.
Gablech I, Klempa J, Pekárek J, Vyroubal P, Hrabina J, Holá M, Kunz J, Brodský J, Neužil P. Gablech I, et al. Among authors: brodsky j. Micromachines (Basel). 2020 Jan 28;11(2):143. doi: 10.3390/mi11020143. Micromachines (Basel). 2020. PMID: 32012859 Free PMC article.
Infinite Selectivity of Wet SiO2 Etching in Respect to Al.
Gablech I, Brodský J, Pekárek J, Neužil P. Gablech I, et al. Among authors: brodsky j. Micromachines (Basel). 2020 Mar 31;11(4):365. doi: 10.3390/mi11040365. Micromachines (Basel). 2020. PMID: 32244504 Free PMC article.