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Page 1
High Quality-Factor and Spectrum-Clean AlN Lamb-Wave Resonators with Optimized Lateral Reflection Boundary Conditions and Transducer Design.
Micromachines (Basel). 2022 May 15;13(5):779. doi: 10.3390/mi13050779.
Micromachines (Basel). 2022.
PMID: 35630246
Free PMC article.
Batch Fabrication of Silicon Nanometer Tip Using Isotropic Inductively Coupled Plasma Etching.
Wang L, Liu M, Zhao J, Zhao J, Zhu Y, Yang J, Yang F.
Wang L, et al. Among authors: zhao j.
Micromachines (Basel). 2020 Jun 29;11(7):638. doi: 10.3390/mi11070638.
Micromachines (Basel). 2020.
PMID: 32610624
Free PMC article.
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A MEMS Fabrication Process with Thermal-Oxide Releasing Barriers and Polysilicon Sacrificial Layers for AlN Lamb-Wave Resonators to Achieve fs·Qm > 3.42 × 1012.
Zhao J, Zhu Z, Sun H, Lv S, Wang X, Song C.
Zhao J, et al.
Micromachines (Basel). 2021 Jul 28;12(8):892. doi: 10.3390/mi12080892.
Micromachines (Basel). 2021.
PMID: 34442514
Free PMC article.
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