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In-Plane MEMS Shallow Arch Beam for Mechanical Memory.
Hafiz MAA, Kosuru L, Ramini A, Chappanda KN, Younis MI. Hafiz MAA, et al. Among authors: chappanda kn. Micromachines (Basel). 2016 Oct 18;7(10):191. doi: 10.3390/mi7100191. Micromachines (Basel). 2016. PMID: 30404364 Free PMC article.