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Results by year
Table representation of search results timeline featuring number of search results per year.
Year | Number of Results |
---|---|
2018 | 1 |
2021 | 1 |
2023 | 0 |
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Page 1
Cavity-BOX SOI: Advanced Silicon Substrate with Pre-Patterned BOX for Monolithic MEMS Fabrication.
Micromachines (Basel). 2021 Apr 8;12(4):414. doi: 10.3390/mi12040414.
Micromachines (Basel). 2021.
PMID: 33918068
Free PMC article.
A Platform for Mechano(-Electrical) Characterization of Free-Standing Micron-Sized Structures and Interconnects.
Savov A, Joshi S, Shafqat S, Hoefnagels J, Louwerse M, Stoute R, Dekker R.
Savov A, et al. Among authors: louwerse m.
Micromachines (Basel). 2018 Jan 18;9(1):39. doi: 10.3390/mi9010039.
Micromachines (Basel). 2018.
PMID: 30393314
Free PMC article.
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