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Table representation of search results timeline featuring number of search results per year.

Year Number of Results
2008 1
2009 1
2010 4
2011 2
2012 3
2013 2
2014 1
2015 3
2016 2
2017 2
2018 3
2019 3
2020 3
2021 2
2022 0
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Page 1
Systematic Characterization of Plasma-Etched Trenches on 4H-SiC Wafers.
Pirnaci MD, Spitaleri L, Tenaglia D, Perricelli F, Fragalà ME, Bongiorno C, Gulino A. Pirnaci MD, et al. Among authors: fragala me. ACS Omega. 2021 Jul 28;6(31):20667-20675. doi: 10.1021/acsomega.1c02905. eCollection 2021 Aug 10. ACS Omega. 2021. PMID: 34396012 Free PMC article.
28 results