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Level set approach to anisotropic wet etching of silicon.
Radjenović B, Radmilović-Radjenović M, Mitrić M. Radjenović B, et al. Among authors: Radmilovic-Radjenovic M. Sensors (Basel). 2010;10(5):4950-67. doi: 10.3390/s100504950. Epub 2010 May 17. Sensors (Basel). 2010. PMID: 22399916 Free PMC article.