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Table representation of search results timeline featuring number of search results per year.

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2005 1
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Page 1
A small-gap electrostatic micro-actuator for large deflections.
Conrad H, Schenk H, Kaiser B, Langa S, Gaudet M, Schimmanz K, Stolz M, Lenz M. Conrad H, et al. Among authors: stolz m. Nat Commun. 2015 Dec 11;6:10078. doi: 10.1038/ncomms10078. Nat Commun. 2015. PMID: 26655557 Free PMC article.
Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers.
Kaiser B, Langa S, Ehrig L, Stolz M, Schenk H, Conrad H, Schenk H, Schimmanz K, Schuffenhauer D. Kaiser B, et al. Among authors: stolz m. Microsyst Nanoeng. 2019 Oct 7;5:43. doi: 10.1038/s41378-019-0095-9. eCollection 2019. Microsyst Nanoeng. 2019. PMID: 31636932 Free PMC article.
20 results