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Raman Spectroscopy and Spectral Signatures of AlScN/Al2O3.
Solonenko D, Žukauskaitė A, Pilz J, Moridi M, Risquez S. Solonenko D, et al. Among authors: moridi m. Micromachines (Basel). 2022 Nov 11;13(11):1961. doi: 10.3390/mi13111961. Micromachines (Basel). 2022. PMID: 36422390 Free PMC article.