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Silicon Metalens Fabrication from Electron Beam to UV-Nanoimprint Lithography.
Baracu AM, Avram MA, Breazu C, Bunea MC, Socol M, Stanculescu A, Matei E, Thrane PCV, Dirdal CA, Dinescu A, Rasoga O. Baracu AM, et al. Among authors: thrane pcv. Nanomaterials (Basel). 2021 Sep 7;11(9):2329. doi: 10.3390/nano11092329. Nanomaterials (Basel). 2021. PMID: 34578646 Free PMC article.
Metasurface Fabrication by Cryogenic and Bosch Deep Reactive Ion Etching.
Baracu AM, Dirdal CA, Avram AM, Dinescu A, Muller R, Jensen GU, Thrane PCV, Angelskår H. Baracu AM, et al. Among authors: thrane pcv. Micromachines (Basel). 2021 Apr 29;12(5):501. doi: 10.3390/mi12050501. Micromachines (Basel). 2021. PMID: 33946701 Free PMC article.