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Showing results for ronchi tang
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Applicability of the Van Cittert-Zernike theorem in a Ronchi shearing interferometer.
Liu Y, Tang F, Wang X, Peng C, Li P. Liu Y, et al. Appl Opt. 2022 Feb 20;61(6):1464-1474. doi: 10.1364/AO.448794. Appl Opt. 2022. PMID: 35201032
Ronchi shearing interferometry is a promising technique for in situ wavefront aberration measurement of the projection lens in advanced photolithography systems. The Van Cittert-Zernike theorem has been used to analyze the interference signal of a Ronchi shearing in …
Ronchi shearing interferometry is a promising technique for in situ wavefront aberration measurement of the projection lens in advanc …
Effects of illumination non-uniformity on the double-Ronchi lateral shearing interference field.
Liu Y, Tang F, Li S, Wang X, Su R. Liu Y, et al. Appl Opt. 2022 Dec 1;61(34):10299-10308. doi: 10.1364/AO.470406. Appl Opt. 2022. PMID: 36606796
Double-Ronchi shearing interferometry is a promising technique for insitu wavefront aberration measurement of the projection lens in photolithography systems. ...
Double-Ronchi shearing interferometry is a promising technique for insitu wavefront aberration measurement of the projection lens in …
Method for designing phase-retrieval algorithms for Ronchi phase-shifting lateral-shearing interferometry.
Wu F, Han J, Tang F. Wu F, et al. Appl Opt. 2019 May 1;58(13):3379-3387. doi: 10.1364/AO.58.003379. Appl Opt. 2019. PMID: 31044833
We propose a general method of designing phase-analysis algorithms for Ronchi phase-shifting lateral-shearing interferometry. Based on the expression and method, three new phase-shifting algorithms are designed to eliminate negative error effects of interference from unwan …
We propose a general method of designing phase-analysis algorithms for Ronchi phase-shifting lateral-shearing interferometry. Based o …
Effects and elimination of image grating defocusing on a double-Ronchi shearing interference field.
Liu Y, Tang F, Li S, Wang X. Liu Y, et al. Appl Opt. 2023 May 10;62(14):3623-3631. doi: 10.1364/AO.485832. Appl Opt. 2023. PMID: 37706978
Double-Ronchi shearing interferometry is a promising wavefront aberration measurement system for advanced lithography projection lens systems. ...
Double-Ronchi shearing interferometry is a promising wavefront aberration measurement system for advanced lithography projection lens …