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2021 2
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Spherical silicon micromirrors bent by anodic bonding.
Wu T, Yamasaki T, Hokari R, Hane K. Wu T, et al. Among authors: hokari r. Opt Express. 2011 Jun 6;19(12):11897-905. doi: 10.1364/OE.19.011897. Opt Express. 2011. PMID: 21716423 Free article.