High-precision deformation mapping in finFET transistors with two nanometre spatial resolution by precession electron diffraction.
Appl Phys Lett. 2017 May 29;110(22):223109. doi: 10.1063/1.4983124. Epub 2017 Jun 1.
Appl Phys Lett. 2017.
PMID: 28652641
Free PMC article.