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Advanced Top-Down Fabrication for a Fused Silica Nanofluidic Device.
Morikawa K, Kazoe Y, Takagi Y, Tsuyama Y, Pihosh Y, Tsukahara T, Kitamori T. Morikawa K, et al. Among authors: takagi y. Micromachines (Basel). 2020 Nov 9;11(11):995. doi: 10.3390/mi11110995. Micromachines (Basel). 2020. PMID: 33182488 Free PMC article.