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Beam-supported AlN thin film bulk acoustic resonators.
Callaghan LA, Lughi V, MacDonald NC, Clarke DR. Callaghan LA, et al. IEEE Trans Ultrason Ferroelectr Freq Control. 2006 May;53(5):1001-7. doi: 10.1109/tuffc.2006.1632689. IEEE Trans Ultrason Ferroelectr Freq Control. 2006. PMID: 16764453