Flexible PZT-Based Row-Column Addressed 2-D PMUT Array.
Joshi SV, Sadeghpour S, Kraft M.
Joshi SV, et al.
IEEE Trans Ultrason Ferroelectr Freq Control. 2024 Nov;71(11):1616-1626. doi: 10.1109/TUFFC.2024.3465589. Epub 2024 Nov 27.
IEEE Trans Ultrason Ferroelectr Freq Control. 2024.
PMID: 39312430
The fabrication uses a temporary carrier wafer from which the array device is released by deep reactive ion etching (DRIE). About 0.8- m-thick sol-gel processed lead zirconate titanate (PZT) thin film acts as the active piezoelectric. The flexible PMUT membrane includes th …
The fabrication uses a temporary carrier wafer from which the array device is released by deep reactive ion etching (DRIE). About 0.8- m …