Hydrogen peroxide (HP) decontamination is effective for a wide spectrum of pathogenic microorganisms. However, exposure to HP causes deleterious effects on some materials. The purpose of this study was to examine material compatibilities with ionized and vaporized hydrogen peroxide (iHP and VHP). With regard to iHP, 24 kinds of materials were exposed up to 100 cycles to iHP. The tested materials included plastics, metals, woods and plated or coated goods. The procedure of iHP decontamination was as following: gas time (11 min), dwell time (15 min) and aeration time (120 min). iHP decontamination caused some damage to copper, brass, chromium plate and galvanized iron immediately after exposure. Repeated iHP decontamination caused marked damage in stainless steel and urethane-, silicone- or epoxy-coating materials. Condensation of iHP decontamination posed severe damage for the material surfaces. With regard to VHP, 36 kinds of materials were exposed for up to 200 cycles to VHP decontamination. Under dry (dehumidified) conditions, VHP decontamination caused few changes on the surfaces of resin materials in dry conditions, although some resins began to develop hardening or softening. Discoloration was found in the stainless steel and changes in its coating materials. Bleaching was also observed in wooden materials. Under condensation conditions of VHP, nylon softened and butyl rubber hardened. Condensation of VHP caused material damage such as discoloration in the stainless steel, corrosion of zinc-plated steel, and air-bubbling under the color-steel sheet. The high concentrations of HP with condensation caused severe changes in metals and resins after repeated exposure. The VHP decontamination tests provided evidence that the material damage was more severe under condensation conditions than under dry conditions. Our results demonstrate the importance of condensation of HP when using it to decontaminate equipment.