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The Nanolithography Toolbox.
Balram KC, Westly DA, Davanço M, Grutter KE, Li Q, Michels T, Ray CH, Yu L, Kasica RJ, Wallin CB, Gilbert IJ, Bryce BA, Simelgor G, Topolancik J, Lobontiu N, Liu Y, Neuzil P, Svatos V, Dill KA, Bertrand NA, Metzler MG, Lopez G, Czaplewski DA, Ocola L, Srinivasan KA, Stavis SM, Aksyuk VA, Liddle JA, Krylov S, Ilic BR. Balram KC, et al. Among authors: liu y. J Res Natl Inst Stand Technol. 2016 Oct 19;121:464-475. doi: 10.6028/jres.121.024. eCollection 2016. J Res Natl Inst Stand Technol. 2016. PMID: 34434635 Free PMC article.
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