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Microfabricated silicon dioxide cantilever with subwavelength aperture.
Mitsuoka Y, Niwa T, Ichihara S, Kato K, Muramatsu H, Nakajima K, Shikida M, Sato K. Mitsuoka Y, et al. Among authors: shikida m. J Microsc. 2001 Apr;202(Pt 1):12-5. doi: 10.1046/j.1365-2818.2001.00867.x. J Microsc. 2001. PMID: 11298862 Free article.