Bayesian Machine Learning for Efficient Minimization of Defects in ALD Passivation Layers.
Dogan G, Demir SO, Gutzler R, Gruhn H, Dayan CB, Sanli UT, Silber C, Culha U, Sitti M, Schütz G, Grévent C, Keskinbora K.
Dogan G, et al. Among authors: sitti m.
ACS Appl Mater Interfaces. 2021 Nov 17;13(45):54503-54515. doi: 10.1021/acsami.1c14586. Epub 2021 Nov 4.
ACS Appl Mater Interfaces. 2021.
PMID: 34735111
Free PMC article.