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Sub-20 nm Si/Ge superlattice nanowires by metal-assisted etching.
Geyer N, Huang Z, Fuhrmann B, Grimm S, Reiche M, Nguyen-Duc TK, de Boor J, Leipner HS, Werner P, Gösele U. Geyer N, et al. Among authors: werner p. Nano Lett. 2009 Sep;9(9):3106-10. doi: 10.1021/nl900751g. Nano Lett. 2009. PMID: 19655719
Metal-assisted chemical etching of silicon: a review.
Huang Z, Geyer N, Werner P, de Boor J, Gösele U. Huang Z, et al. Among authors: werner p. Adv Mater. 2011 Jan 11;23(2):285-308. doi: 10.1002/adma.201001784. Adv Mater. 2011. PMID: 20859941 Review.
1,092 results