Emergent chemical mapping at atomic-column resolution by energy-dispersive x-ray spectroscopy in an aberration-corrected electron microscope

Phys Rev Lett. 2010 May 14;104(19):196101. doi: 10.1103/PhysRevLett.104.196101. Epub 2010 May 11.

Abstract

Chemical mapping at atomic-column resolution by energy-dispersive x-ray spectroscopy in a spherical aberration-corrected scanning transmission electron microscope (STEM) has been demonstrated for the 1.47-A dumbbell structure in InGaAs. The structural imaging and the chemical information in the two-dimensional map are directly correlated. Comparisons with the other existing mapping techniques of STEM in conjunction with electron energy-loss spectroscopy were discussed from aspects of ionization interactions.