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Uniform Growth of Sub-5-Nanometer High-κ Dielectrics on MoS2 Using Plasma-Enhanced Atomic Layer Deposition.
ACS Appl Mater Interfaces. 2017 Jul 12;9(27):23072-23080. doi: 10.1021/acsami.7b00538. Epub 2017 Jun 27.
ACS Appl Mater Interfaces. 2017.
PMID: 28653822
Uncovering the Effects of Metal Contacts on Monolayer MoS2.
Schauble K, Zakhidov D, Yalon E, Deshmukh S, Grady RW, Cooley KA, McClellan CJ, Vaziri S, Passarello D, Mohney SE, Toney MF, Sood AK, Salleo A, Pop E.
Schauble K, et al.
ACS Nano. 2020 Nov 24;14(11):14798-14808. doi: 10.1021/acsnano.0c03515. Epub 2020 Sep 23.
ACS Nano. 2020.
PMID: 32905703
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