Ultra-low-loss high-aspect-ratio Si3N4 waveguides.
Bauters JF, Heck MJ, John D, Dai D, Tien MC, Barton JS, Leinse A, Heideman RG, Blumenthal DJ, Bowers JE.
Bauters JF, et al.
Opt Express. 2011 Feb 14;19(4):3163-74. doi: 10.1364/OE.19.003163.
Opt Express. 2011.
PMID: 21369138
Free article.