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A vibrating beam MEMS accelerometer for gravity and seismic measurements.
Sci Rep. 2020 Jun 26;10(1):10415. doi: 10.1038/s41598-020-67046-x.
Sci Rep. 2020.
PMID: 32591608
Free PMC article.
Closed-Loop Characterization of Noise and Stability in a Mode-Localized Resonant MEMS Sensor.
Pandit M, Zhao C, Sobreviela G, Mustafazade A, Du S, Zou X, Seshia AA.
Pandit M, et al. Among authors: mustafazade a.
IEEE Trans Ultrason Ferroelectr Freq Control. 2019 Jan;66(1):170-180. doi: 10.1109/TUFFC.2018.2878241. Epub 2018 Oct 26.
IEEE Trans Ultrason Ferroelectr Freq Control. 2019.
PMID: 30371360
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