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A Parylene Neural Probe Array for Multi-Region Deep Brain Recordings.
J Microelectromech Syst. 2020 Aug;29(4):499-513. doi: 10.1109/jmems.2020.3000235. Epub 2022 Jun 22.
J Microelectromech Syst. 2020.
PMID: 35663261
Free PMC article.
Techniques and Considerations in the Microfabrication of Parylene C Microelectromechanical Systems.
Ortigoza-Diaz J, Scholten K, Larson C, Cobo A, Hudson T, Yoo J, Baldwin A, Weltman Hirschberg A, Meng E.
Ortigoza-Diaz J, et al. Among authors: weltman hirschberg a.
Micromachines (Basel). 2018 Aug 22;9(9):422. doi: 10.3390/mi9090422.
Micromachines (Basel). 2018.
PMID: 30424355
Free PMC article.
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