A stand-alone compact EUV microscope based on gas-puff target source.
Torrisi A, Wachulak P, Węgrzyński Ł, Fok T, Bartnik A, Parkman T, Vondrová Š, Turňová J, Jankiewicz BJ, Bartosewicz B, Fiedorowicz H.
Torrisi A, et al. Among authors: fiedorowicz h.
J Microsc. 2017 Feb;265(2):251-260. doi: 10.1111/jmi.12494. Epub 2016 Oct 21.
J Microsc. 2017.
PMID: 27766644