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Hybrid multi-chip assembly of optical communication engines by in situ 3D nano-lithography.
Blaicher M, Billah MR, Kemal J, Hoose T, Marin-Palomo P, Hofmann A, Kutuvantavida Y, Kieninger C, Dietrich PI, Lauermann M, Wolf S, Troppenz U, Moehrle M, Merget F, Skacel S, Witzens J, Randel S, Freude W, Koos C. Blaicher M, et al. Among authors: moehrle m. Light Sci Appl. 2020 Apr 27;9:71. doi: 10.1038/s41377-020-0272-5. eCollection 2020. Light Sci Appl. 2020. PMID: 32351695 Free PMC article.