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2017 | 1 |
2023 | 1 |
2024 | 0 |
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Aluminum Nitride Out-of-Plane Piezoelectric MEMS Actuators.
Micromachines (Basel). 2023 Mar 22;14(3):700. doi: 10.3390/mi14030700.
Micromachines (Basel). 2023.
PMID: 36985106
Free PMC article.
Rotating Circular Micro-Platform with Integrated Waveguides and Latching Arm for Reconfigurable Integrated Optics.
Briere J, Elsayed MY, Saidani M, Bérard M, Beaulieu PO, Rabbani-Haghighi H, Nabki F, Ménard M.
Briere J, et al.
Micromachines (Basel). 2017 Dec 1;8(12):354. doi: 10.3390/mi8120354.
Micromachines (Basel). 2017.
PMID: 30400544
Free PMC article.
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