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Hafnium Oxide Nanostructured Thin Films: Electrophoretic Deposition Process and DUV Photolithography Patterning.
Nanomaterials (Basel). 2022 Jul 7;12(14):2334. doi: 10.3390/nano12142334.
Nanomaterials (Basel). 2022.
PMID: 35889559
Free PMC article.
Deep-UV laser direct writing of photoluminescent ZnO submicron patterns: an example of nanoarchitectonics concept.
Kirscher Q, Hajjar-Garreau S, Grasset F, Berling D, Soppera O.
Kirscher Q, et al.
Sci Technol Adv Mater. 2022 Oct 7;23(1):535-546. doi: 10.1080/14686996.2022.2116294. eCollection 2022.
Sci Technol Adv Mater. 2022.
PMID: 36238440
Free PMC article.
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